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RGA (residual gas analysis) results for RESOLUTE™ UHV absolute optical encoders
Renishaw offers RGA (residual gas analysis) data for various RESOLUTE vacuum systems. This shows the effect the encoder system has on a vacuum environment.
A quadrupole mass spectrometer (AccuQuad 200 RGA) was used to collect RGA (residual gas analysis) data. Chamber pressure was measured with an Ion Gauge (G8130). After initial conditioning of the system, a background spectrum was recorded together with the total pressure in the test chamber.
The component was placed in the vacuum system (0.0035 m3) which was then pumped using an KJL Lion 802 (800/s) diode ion pump and a Divac diaphragm pump at ambient temperature for 24 hours, after which a background scan and the total pressure in the test chamber were recorded again. If the system pressure was better than 5 x 10-9 mbar, the test specimen was baked at 120 °C for 48 hours. The system was then allowed to cool to ambient temperature before a final mass spectrum and total pressure measurement were taken. The final RGA scans are shown below.
Exact reproduction of these results should not be expected, as RGA data depends on the condition, specification and performance of the vacuum system. However, the Residual Gas Analysis results test shows no significant contamination attributable to RESOLUTE UHV and that UHV conditions can be achieved in the presence of this product.